Integrated circuit device

ABSTRACT

An integrated circuit device includes a memory including a memory cell insulation surrounding a memory stack and a memory cell interconnection unit, a peripheral circuit including a peripheral circuit region formed on a peripheral circuit board, and a peripheral circuit interconnection between the peripheral circuit region and the memory structure, a plurality of conductive bonding structures on a boundary between the memory cell interconnection and the peripheral circuit interconnection in a first region, the first region overlapping the memory stack in a vertical direction, and a through electrode penetrating one of the memory cell insulation and the peripheral circuit board and extended to a lower conductive pattern included in the peripheral circuit interconnection in a second region, the second region overlapping the memory cell insulation in the vertical direction.

CROSS-REFERENCE TO RELATED APPLICATION

The present application is a continuation of and claims priority under35 U.S.C. § 120 to U.S. patent application Ser. No. 16/806,030, filed onMar. 2, 2020, which hereby claims priority under Korean PatentApplication No. 10-2019-0107645, filed on Aug. 30, 2019, in the KoreanIntellectual Property Office, the disclosure of which is incorporatedherein in its entirety by reference.

BACKGROUND

The inventive concepts relate to integrated circuit devices, and moreparticularly, to integrated circuit devices including a nonvolatilememory device having a cell over periphery (COP) structure.

In accordance with the multifunctionalization of informationcommunication apparatuses, integrated circuit devices including memorydevices have become mass storage and highly integrated, and thus sizesof memory cells have gradually reduced and operation circuits andinterconnection structures included in the memory devices for theoperation and electrical connection of the memory devices are becomingmore complicated. Accordingly, there is a need for an integrated circuitdevice including a memory device having a structure with excellentelectrical characteristics while improving the degree of integration.

SUMMARY

The inventive concepts provide an integrated circuit device having astructure capable of improving the reliability of an interconnectionstructure with improved integration and reduced chip size.

According to some aspects of the inventive concepts, there is providedan integrated circuit device including: a memory including a memorystack unit, a memory cell interconnection including a plurality of upperconductive patterns configured to be electrically connectable to thememory stack unit, and a memory cell insulation surrounding the memorystack and the memory cell interconnection unit; a peripheral circuitincluding a peripheral circuit board, a peripheral circuit region on theperipheral circuit board, and a peripheral circuit interconnectionincluding a plurality of lower conductive patterns between theperipheral circuit region and the memory and bonded to the memory cellinterconnection unit; a plurality of conductive bonding structures on aboundary between the memory cell interconnection and the peripheralcircuit interconnection in a first region, the first region overlappingthe memory stack in a vertical direction, the plurality of conductivebonding structures being bonded plurality of first upper conductivepatterns selected from among the plurality of upper conductive patternsand a respective plurality of first lower conductive patterns selectedfrom among the plurality of lower conductive patterns; and a throughelectrode penetrating one of the memory cell insulation and theperipheral circuit board and extended to a second lower conductivepattern selected from among the plurality of lower conductive patternsin the vertical direction, in a second region, the second regionoverlapping the memory cell insulation in the vertical direction.

According to an aspect of the inventive concept, there is provided anintegrated circuit device including: a memory including a memory stackincluding a plurality of bit lines extending in a first horizontaldirection, a memory cell interconnection including a plurality of upperconductive patterns configured to be electrically connectable to theplurality of bit lines, and a memory cell insulation surrounding thememory stack and the memory cell interconnection unit; a peripheralcircuit including a peripheral circuit board, a peripheral circuitregion on the peripheral circuit board, and a peripheral circuitinterconnection including a plurality of lower conductive patternsbetween the peripheral circuit region and the memory and bonded to thememory cell interconnection unit; a conductive bonding on a boundarybetween the memory cell interconnection and the peripheral circuitinterconnection in a first region, the first region overlapping thememory stack in a vertical direction, the conductive bonding beingbonded first upper conductive pattern selected from among the pluralityof upper conductive patterns and a first lower conductive patternselected from among the plurality of lower conductive patterns; and aplurality of through electrodes extended in the vertical directionthrough one of the memory cell insulation and the peripheral circuitboard, in a second region spaced apart from the first region in ahorizontal direction, wherein the plurality of through electrodesinclude a plurality of first through electrodes arranged in a line alongthe first horizontal direction in the second region.

According to an aspect of the inventive concept, there is provided anintegrated circuit device including: a memory including a semiconductorlayer, a memory stack on the semiconductor layer, a memory cellinterconnection including a plurality of upper conductive patternsoverlapping the memory stack in a vertical direction and configured tobe electrically connectable to the memory stack unit, and a memory cellinsulation surrounding the semiconductor layer, the memory stack and thememory cell interconnection unit; a peripheral circuit including aperipheral circuit board, a peripheral circuit region on the peripheralcircuit board, and a peripheral circuit interconnection between theperipheral circuit region and the memory and bonded to the memory cellinterconnection unit; a plurality of conductive bonding structuresincluding Cu and on a boundary between the memory cell interconnectionand the peripheral circuit interconnection in a first region, the firstregion overlapping the memory stack in the vertical direction; aplurality of lower conductive patterns including at least one metalselected from among Al, W, and Cu and in the peripheral circuitinterconnection in a second region, the second region overlapping thememory cell insulation in the vertical direction; and a throughelectrode penetrating one of the memory cell insulation and theperipheral circuit board in the second region and contacting one lowerconductive pattern among the plurality of lower conductive patterns.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the inventive concepts will be more clearly understoodfrom the following detailed description taken in conjunction with theaccompanying drawings in which:

FIG. 1 is a block diagram of an integrated circuit device according toexample embodiments of the inventive concepts;

FIG. 2 is a perspective view illustrating a schematic structure of anintegrated circuit device according to example embodiments of theinventive concepts;

FIG. 3 is a perspective view illustrating a schematic structure of anintegrated circuit device according to example embodiments of theinventive concepts;

FIG. 4A is a plan view illustrating an example structure of somecomponents of a memory cell array that may be included in an integratedcircuit device according to example embodiments of the inventiveconcepts, and FIG. 4B is a cross-sectional view showing some componentsof cross sections taken along lines A1-A1′ and A2-A2′ of FIG. 4A;

FIGS. 5A and 5B are exploded plan views respectively illustrating somecomponents of an integrated circuit device according to exampleembodiments of the inventive concepts;

FIGS. 6 to 13 are cross-sectional views illustrating an integratedcircuit devices according to example embodiments of the inventiveconcepts;

FIGS. 14A and 14B are exploded plan views respectively illustrating somecomponents of an integrated circuit device according to exampleembodiments of the inventive concepts;

FIGS. 15 to 18 are cross-sectional views illustrating an integratedcircuit devices according to example embodiments of the inventiveconcepts;

FIGS. 19A to 19D are cross-sectional views illustrating a method ofmanufacturing an integrated circuit device in the order of process,according to example embodiments of the inventive concepts; and

FIGS. 20A to 20C are cross-sectional views illustrating a method ofmanufacturing an integrated circuit device in the order of process,according to example embodiments of the inventive concepts.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Hereinafter, example embodiments of the inventive concepts will bedescribed in detail with reference to the accompanying drawings. Thesame reference numerals are used for the same elements in the drawings,and redundant description thereof will be omitted.

FIG. 1 is a block diagram of an integrated circuit device 10 accordingto example embodiments of the inventive concepts.

Referring to FIG. 1, the integrated circuit device 10 may include amemory cell array 20 and a peripheral circuit 30. The memory cell array20 may include a plurality of memory cell blocks BLK1, BLK2, . . . , andBLKn. Each of the plurality of memory cell blocks BLK1, BLK2, . . . ,and BLKn may include a plurality of memory cells. The memory cell blocksBLK1, BLK2, . . . , and BLKn may be connected to the peripheral circuit30 through a bit line BL, a word line WL, a string select line SSL, anda ground select line GSL.

The peripheral circuit 30 may include a row decoder 32, a page buffer34, a data input/output circuit 36, and a control logic 38. Although notshown in FIG. 1, the peripheral circuit 30 may further include aninput/output interface, a column logic, a voltage generator, apre-decoder, a temperature sensor, a command decoder, an addressdecoder, and the like.

The peripheral circuit 30 (as well as other elements and/orsub-elements, such as the row decoder 32, page buffer 34, datainput/output circuit 36, and control logic 38) may include processingcircuitry such as hardware including logic circuits; a hardware/softwarecombination such as a processor executing software; or a combinationthereof. For example, the processing circuitry more specifically mayinclude, but is not limited to, a central processing unit (CPU) , anarithmetic logic unit (ALU), a digital signal processor, amicrocomputer, a field programmable gate array (FPGA), a System-on-Chip(SoC), a programmable logic unit, a microprocessor, application-specificintegrated circuit (ASIC), etc.

The memory cell array 20 may be connected to the page buffer 34 throughthe bit line BL and may be connected to the row decoder 32 through theword line WL, the string select line SSL, and the ground select lineGSL. In the memory cell array 20, the plurality of memory cells includedin the plurality of memory cell blocks BLK1, BLK2, . . . , and BLKn maybe flash memory cells, respectively. The memory cell array 20 mayinclude a three dimensional memory cell array. The three dimensionalmemory cell array may include a plurality of NAND strings, and each ofthe NAND strings may include memory cells respectively connected to aplurality of word lines WL vertically stacked on a substrate. In exampleembodiments, the memory cell array 20 may include a memory stack MSdescribed below with reference to FIGS. 4A and 4B.

The peripheral circuit 30 may receive an address ADDR, a command CMD,and a control signal CTRL from the outside of the integrated circuitdevice 10, and may transmit and receive data DATA to and from anapparatus outside the integrated circuit device 10.

The row decoder 32 may select at least one of the plurality of memorycell blocks BLK1, BLK2, . . . , and BLKn in response to an address ADDRfrom the outside and may select the word line WL, the string select lineSSL, and the ground select line GSL of the selected memory cell block.The row decoder 32 may transmit a voltage for performing a memoryoperation to the word line WL of the selected memory cell block.

The page buffer 34 may be connected to the memory cell array 20 throughthe bit line BL. The page buffer 34 may operate as a write driver in aprogram operation and thus apply a voltage corresponding to the dataDATA to be stored in the memory cell array 20 to the bit line BL and mayoperate as a sense amplifier in a read operation and thus sense the dataDATA stored in the memory cell array 20. The page buffer 34 may operateaccording to a control signal PCTL to be provided from the control logic38.

The data input/output circuit 36 may be connected to the page buffer 34through data lines DLs. The data input/output circuit 36 may receive thedata DATA from a memory controller (not shown) in the program operationand may provide program data DATA to the page buffer 34 based on acolumn address C_ADDR to be provided from the control logic 38. The datainput/output circuit 36 may provide read data DATA stored in the pagebuffer 34 to the memory controller, based on the column address C_ADDRto be provided from the control logic 38 in the read operation.

The data input/output circuit 36 may transmit an input address orcommand to the control logic 38 or the row decoder 32. The peripheralcircuit 30 of the integrated circuit device 10 may further include anelectrostatic discharge (ESD) circuit and a pull-up/pull-down driver.

The control logic 38 may receive the command CMD and the control signalCTRL from the memory controller. The control logic 38 may provide a rowaddress R_ADDR to the row decoder 32 and may provide the column addressC_ADDR to the data input/output circuit 36. The control logic 38 maygenerate various internal control signals to be used in the integratedcircuit device 10 in response to the control signal CTRL. For example,the control logic 38 may adjust voltage levels to be provided to theword line WL and the bit line BL when performing a memory operation suchas a program operation or an erase operation.

FIG. 2 is a perspective view illustrating a schematic structure of anintegrated circuit device 100 according to example embodiments of theinventive concepts. The integrated circuit device 100 may be a specificimplementation of some of the example embodiments of the integratedcircuit device 10 illustrated in FIG. 1.

Referring to FIG. 2, the integrated circuit device 100 may include amemory structure MST and a peripheral circuit structure PST overlappingeach other in a vertical direction (a Z direction).

The memory structure MST may include a memory stack unit MSP including amemory cell array 20 (see FIG. 1), a memory cell interconnection unitC60 configured to be electrically connected to the memory stack unitMSP, and a memory cell insulation unit C70 surrounding the memory stackunit MSP and the memory cell interconnection unit C60. The memory cellinsulation unit C70 may be disposed to surround at least two sides ofthe memory stack unit MSP at a position vertically overlapping with theperipheral circuit structure PST. FIG. 2 illustrates that the memorycell insulation unit C70 may have a ring shape surrounding four sides ofthe memory stack unit MSP such that the memory cell insulation unit C70covers both sides in an X direction and both sides in a Y direction ofthe memory stack unit MSP, but the inventive concepts are not limited tothe illustration in FIG. 2. The memory cell insulation unit C70 may bearranged to surround at least one of both sides of the X direction andat least one of both sides of the Y direction of the memory stack unitMSP.

The peripheral circuit structure PST may include a peripheral circuitboard SUB, a peripheral circuit region P30 and a peripheral circuitinterconnection part P80 sequentially formed on the peripheral circuitboard SUB. The peripheral circuit region P30 may include the peripheralcircuit 30 described with reference to FIG. 1. The peripheral circuitinterconnection unit P80 may be configured to be electrically connectedto the peripheral circuit 30 included in the peripheral circuit boardSUB and the peripheral circuit region P30. The peripheral circuit regionP30 may be spaced apart from the memory stack unit MSP in the verticaldirection (the Z direction) with the memory cell interconnection unitC60 and the peripheral circuit interconnection unit P80 therebetween.

The integrated circuit device 100 may have a cell over periphery (COP)structure in which the memory structure MST may be disposed on theperipheral circuit structure PST, thereby reducing a horizontal area ofthe integrated circuit device 100 and improving the degree ofintegration.

Each of the memory cell interconnection unit C60 and the peripheralcircuit interconnection unit P80 may include a plurality of conductivepatterns and a plurality of contact plugs for interconnecting twoconductive patterns adjacent in the vertical direction among theplurality of conductive patterns (not illustrated). The memory cellinterconnection unit C60 and the peripheral circuit interconnection unitP80 may be in contact with each other by bonding. The plurality ofconductive patterns of each of the memory cell interconnection unit C60and the peripheral circuit interconnection unit P80 may include aplurality of conductive bonding patterns for mutually bonding the memorycell interconnection unit C60 and the peripheral circuit interconnectionunit P80 (not illustrated). A plurality of conductive bondingstructures, which are a result obtained by bonding the conductivebonding pattern included in the memory cell interconnection unit C60 andthe conductive bonding pattern included in the peripheral circuitinterconnection unit P80, may be arranged along a boundary between thememory cell interconnection unit C60 and the peripheral circuitinterconnection unit P80. The conductive bonding structure may not bedisposed at a boundary between the memory cell insulation unit C70 andthe peripheral circuit interconnection unit P80.

The integrated circuit device 100 may include a plurality of throughelectrodes THV penetrating the memory cell insulation unit C70 in thevertical direction. Each of the plurality of through electrodes THV mayinclude a first portion THVA penetrating the memory cell insulation unitC70 and a second portion THVB penetrating a portion of the peripheralcircuit interconnection unit P80. Each of the plurality of throughelectrodes THV may be connected to at least one conductive patternselected from among a plurality of conductive patterns included in theperipheral circuit interconnection unit P80 and may be connected to theperipheral circuit 30 (see FIG. 1) in the peripheral circuit region P30through the at least one conductive pattern.

There may not be a conductive bonding structure, which is a resultobtained by bonding the conductive bonding pattern included in thememory cell interconnection unit C60 to the conductive bonding patternincluded in the peripheral circuit interconnection unit P80, in anelectrical connection path between the plurality of through electrodesTHV and the peripheral circuit 30 (see FIG. 1) in the peripheral circuitregion P30. Therefore, it may be possible to prevent or reduce theincrease in resistance due to the conductive bonding structure in theelectrical connection path between the plurality of through electrodesTHV and the peripheral circuit 30 (see FIG. 1) in the peripheral circuitregion P30.

FIG. 3 is a perspective view illustrating a schematic structure of anintegrated circuit device 200 according to example embodiments of theinventive concepts. The integrated circuit device 200 may be anotherspecific implementation of some of the example embodiments of theintegrated circuit device 10 illustrated in FIG. 1.

Referring to FIG. 3, the integrated circuit device 200 may havesubstantially the same configuration as the integrated circuit device100 illustrated in FIG. 2. However, the integrated circuit device 200may include a plurality of through electrodes TSV instead of theplurality of through electrodes THV illustrated in FIG. 2. The pluralityof through electrodes TSV may not penetrate the memory structure MST,but may penetrate only the peripheral circuit structure PST. Theplurality of through electrodes TSV may be disposed at positionsoverlapping the memory cell insulation C70 in the peripheral circuitstructure PST. Each of the plurality of through electrodes TSV mayinclude a first portion TSVA penetrating the peripheral circuit boardSUB, a second portion TSVB penetrating the peripheral circuit regionP30, and a third portion TSVC penetrating a portion of the peripheralcircuit interconnection unit P80. In example embodiments, each of theplurality of through electrodes TSV may be connected to at least oneconductive pattern selected from among the plurality of conductivepatterns included in the peripheral circuit interconnection unit P80.Each of the plurality of through electrodes TSV may be connected to theperipheral circuit 30 (see FIG. 1) in the peripheral circuit region P30through the at least one conductive pattern.

There may not be a conductive bonding structure which is a resultobtained by bonding the conductive bonding pattern included in thememory cell interconnection unit C60 to the conductive bonding patternincluded in the peripheral circuit interconnection unit P80, in anelectrical connection path between the plurality of through electrodesTSV and the peripheral circuit 30 (see FIG. 1) in the peripheral circuitregion P30. Therefore, it may be possible to fundamentally block and/orreduce the increase in resistance due to the conductive bondingstructure in the electrical connection path between the plurality ofthrough electrodes TSV and the peripheral circuit 30 (see FIG. 1) in theperipheral circuit region P30.

In some example embodiments, an integrated circuit device may includeboth the through electrodes THV and TSV such that peripheral circuitinterconnection unit P80 includes at least one conductive patternselected from among the plurality of conductive patterns included in theperipheral circuit interconnection unit P80 connected to a throughelectrode THV, and at least one other conductive pattern selected fromamong the plurality of conductive patterns included in the peripheralcircuit interconnection unit P80 connected to a through electrode TSV.

FIG. 4A is a plan view illustrating an example structure of somecomponents of the memory cell array 20 illustrated in FIG. 1, and FIG.4B is a cross-sectional view illustrating some configurations of across-section taken along line A1-A1′ and a cross-section taken alongline A2-A2′ of FIG. 4A.

Referring to FIGS. 4A and 4B, the memory cell array 20 may include asemiconductor layer 102 including a memory cell region MEC and aconnection region CON. The semiconductor layer 102 may have a mainsurface 102M extending in the horizontal direction along an X-Y plane ofFIG. 4B. The semiconductor layer 102 may include a single crystalsemiconductor or a polycrystalline semiconductor. The semiconductorlayer 102 may include Si, Ge, or SiGe. The connection region CON may bedisposed adjacent to an edge side of the memory cell region MEC. FIGS.4A and 4B illustrate that the connection region CON is only disposed onone side of the memory cell region MEC, but the connection region CONmay be disposed on one or both sides of the memory cell region MEC in afirst horizontal direction (the X direction).

The memory stack MS extending over the memory cell region MEC and theconnection region CON may be formed on the semiconductor layer 102. Thememory stack MS may include the plurality of word lines WL disposed inthe memory cell region MEC, and a plurality of pad regions 112 disposedin the connection region CON and integrally connected to the pluralityof word lines WL. The plurality of word lines WL may extend in thehorizontal direction parallel to the main surface 102M of thesemiconductor layer 102 and may overlap each other in the verticaldirection (the Z direction). The plurality of pad regions 112 may beconfigured to form a stepped connection part 110 in the connectionregion CON.

The plurality of word lines WL may include the ground select line GSLand the string select line SSL. A stacked number of the plurality ofword lines WL overlapping each other in the vertical direction (the Zdirection) in the memory cell region MEC may be at least 48, 64, or 96,but the stacked number of the plurality of word lines WL is not limitedto the above examples.

A plurality of word line cut regions WLC may extend in the firsthorizontal direction (the X direction) parallel to the main surface 102Mof the semiconductor layer 102. The plurality of word line cut regionsWLC may define a width of each of the plurality of word lines WL in asecond horizontal direction (the Y direction).

A plurality of common source regions (not shown) may be formed to extendin the X direction in the semiconductor layer 102. In some exampleembodiments, the plurality of common source regions may include animpurity region heavily doped with n-type impurities. The plurality ofcommon source regions may function as a source region for supplyingcurrent to vertical-type memory cells. A plurality of common sourcepatterns CSP may extend in the X direction on the plurality of commonsource regions. The plurality of common source patterns CSP may beformed to fill a portion of the word line cut region WLC. The commonsource pattern CSP may be surrounded by an insulating spacer 120 in theword line cut region WLC. The insulating spacer 120 may include an oxidefilm, a nitride film, or a combination thereof.

Two string select lines SSL neighboring in the Y direction may be spacedapart from each other with a string select line cut region SSLCtherebetween. The string select line cut region SSLC may be filled withan insulating film 122. The insulating film 122 may include an oxidefilm, a nitride film, and/or a combination thereof.

The plurality of word lines WL and the plurality of pad regions 112 mayrespectively include metal, metal silicide, a semiconductor doped withimpurities, and/or combinations thereof. For example, each of theplurality of word lines WL may include metal such as W, Ni, Co, Ta,and/or the like, metal silicide such as tungsten silicide, nickelsilicide, cobalt silicide, tantalum silicide, and/or the like,polysilicon doped with impurities, and/or combinations thereof.

A plurality of insulating films 124 may be between the semiconductorlayer 102 and the ground select line GSL and between the plurality ofword lines WL. The insulating film 124 closest to the semiconductorlayer 102 among the plurality of insulating films 124 may have athickness less than that of the other insulating films 124. Theinsulating film 124 furthest from the semiconductor layer 102 among theplurality of insulating films 124 may cover a top surface of the stringselect line SSL. The plurality of insulating films 124 may includesilicon oxide, silicon nitride, and/or SiON.

In the memory cell region MEC, a plurality of channel structures 130 mayextend in the vertical direction (the Z direction) through the pluralityof word lines WL and the plurality of insulating films 124. Theplurality of channel structures 130 may be arranged to be spaced apartfrom each other at predetermined, or desired, intervals in the X and Ydirections. The plurality of channel structures 130 may include a gatedielectric film 132, a channel region 134, a buried insulating film 136,and a drain region 138, respectively. The channel region 134 may includedoped polysilicon and/or undoped polysilicon. The channel region 134 mayhave a cylindrical shape, although other shapes may be used. An internalspace of the channel region 134 may be filled with the buried insulatingfilm 136. The buried insulating film 136 may include an insulatingmaterial. For example, the buried insulating film 136 may includesilicon oxide, silicon nitride, SiON, and/or combinations thereof. Thedrain region 138 may include polysilicon doped with impurities, metal,conductive metal nitride, or combinations thereof. Examples of the metalthat may constitute the drain region 138 may include W, Ni, Co, Ta,and/or the like. The plurality of drain regions 138 may be insulatedfrom each other by an insulating film 137. The insulating film 137 mayinclude an oxide film, a nitride film, and/or a combination thereof.

In the memory cell region MEC, a plurality of bit lines BL may bedisposed on the plurality of word lines WL and the plurality of channelstructures 130. The plurality of bit lines BL may be disposed inparallel to each other and may extend in the Y direction. A plurality ofbit line contact pads 142 may be between the plurality of channelstructures 130 and the plurality of bit lines BL. The drain region 138may be connected to one corresponding bit line BL among the plurality ofbit lines BL through the bit line contact pad 142. The plurality of bitline contact pads 142 may be insulated from each other by an insulatingfilm 143. The plurality of bit lines BL may be insulated from each otherby an insulating film 145. The plurality of bit line contact pads 142and the plurality of bit lines BL may include metal, metal nitride, or acombination thereof. For example, the plurality of bit line contact pads142 and the plurality of bit lines BL may have the same material ordifferent materials, and include W, Ti, Ta, Cu, Al, Ti, TiN, TaN, WN,and/or combinations thereof. The insulating film 143 and the insulatingfilm 145 may have the same material or different materials, and includean oxide film, a nitride film, and/or a combination thereof.

An insulating film 114 covering the stepped connection part 110 may bebetween the semiconductor layer 102 and the insulating film 137 in theconnection region CON. The insulating film 114 may cover the pluralityof pad regions 112. In the connection region CON, a plurality of contactplugs 116 may be connected to the stepped connection part 110. Theplurality of contact plugs 116 may extend from the plurality of padregions 112 through the insulating films 114, 137, and 143 in thevertical direction (the Z direction). A plurality of interconnectionlayers MA may be formed on the plurality of contact plugs 116. Theplurality of interconnection layers MA may be connected to the pluralityof contact plugs 116. The plurality of interconnection layers MA may beconfigured to be electrically connectable to the word lines WL throughthe plurality of contact plugs 116, respectively. The plurality ofinterconnection layers MA may be formed at the same level as theplurality of bit lines BL. Herein, the term “level” may mean a distancein the vertical direction (Z direction or −Z direction) from the mainsurface 102M of the semiconductor layer 102. In the connection regionCON, the plurality of interconnection layers MA may be insulated fromeach other by the insulating film 145. The plurality of contact plugs116 and the plurality of interconnection layers MA may each include W,Ti, Ta, Cu, Al, Ti, TiN, TaN, WN, and/or combinations thereof.

FIG. 5A is an exploded plan view illustrating some components of anintegrated circuit device 300A according to still other exampleembodiments of the inventive concepts. The integrated circuit device300A may have substantially the same configuration as the integratedcircuit device 100 illustrated in FIG. 2. The integrated circuit device300A may include the plurality of through electrodes THV. However, theplurality of through electrodes THV may be arranged to surround foursides of the memory stack unit MSP included in the memory structure MST.A plurality of through electrodes THV1, which is a portion of theplurality of through electrodes THV, may be arranged in a line in anextension direction (the Y direction) of the plurality of bit lines BLincluded in the memory stack unit MSP. A plurality of through electrodesTHV2, which is another portion of the plurality of through electrodesTHV, may be arranged in a line in a width direction (the X direction) ofthe plurality of bit lines BL included in the memory stack unit MSP.

FIG. 5B is an exploded plan view illustrating some components of anintegrated circuit device 300B according to still other exampleembodiments of the inventive concepts. The integrated circuit device300B may have substantially the same configuration as the integratedcircuit device 300A illustrated in FIG. 5A. However, in the integratedcircuit device 300B, the plurality of through electrodes THV may bearranged to surround three sides of the memory stack unit MSP includedin the memory structure MST.

FIGS. 5A and 5B illustrate configurations in which at least three sidesof the memory stack unit MSP of the memory structure MST are arranged tobe surrounded by the plurality of through electrodes THV, but theinventive concepts are not limited to the illustrations in FIGS. 5A and5B. For example, the plurality of through electrodes THV may be disposedto surround one side or two sides of the memory stack unit MSP.

FIG. 6 is a cross-sectional view illustrating an integrated circuitdevice 400A according to example embodiments of the inventive concepts.

Referring to FIG. 6, the integrated circuit device 400A may include amemory structure M4A and a peripheral circuit structure P4A, which arebonded to each other.

The memory structure M4A may include the memory stack unit MSP, thememory cell interconnection unit C60, and the memory cell insulationunit C70 surrounding the memory stack unit MSP and the memory cellinterconnection unit C60.

The memory stack unit MSP may include the memory stack MS. The detailedconfiguration of the memory stack MS is the same as those described withreference to FIGS. 4A and 4B. In FIG. 6, some components of the memorystack MS are omitted for the simplicity of the drawings. The memory cellinterconnection unit C60 may include a plurality of upper conductivepatterns M152 and B162 configured to be electrically connected to thememory stack MS of the memory stack unit MSP. A plurality of contactplugs C154 may be between the plurality of bit lines BL and the upperconductive pattern M152, and between the plurality of interconnectionlayers MA and the upper conductive pattern M152, and a plurality ofcontact plugs C164 may be between the upper conductive pattern M152 andthe upper conductive pattern B162. The memory cell insulation unit C70may include an oxide film, a nitride film, a polymer film, and/orcombinations thereof. The memory cell insulation unit C70 may beintegrally connected to an insulating film 114 covering the memory stackMS.

The peripheral circuit structure P4A may include the peripheral circuitboard SUB, the peripheral circuit region P30 and the peripheral circuitinterconnection unit P80 sequentially formed on the peripheral circuitboard SUB.

The peripheral circuit board SUB may include a first region A1overlapping the memory stack unit MSP in the vertical direction (the Zdirection) and a second region A2 overlapping the memory cell insulationunit C70 in the vertical direction (the Z direction). The peripheralcircuit board SUB may have a main surface SM extending in the horizontaldirection along the X-Y plane. In example embodiments, the peripheralcircuit board SUB may include Si, Ge, or SiGe. In other exampleembodiments, the peripheral circuit board SUB may include a polysiliconfilm, a silicon-on-insulator (SOI) structure, or agermanium-on-insulator (GeOI) structure.

The peripheral circuit 30 described with reference to FIG. 1 may beformed in the peripheral circuit region P30. The peripheral circuitregion P30 may include a plurality of transistors TR formed on an activeregion of the peripheral circuit board SUB. Each of the transistors TRmay include a gate PG and source/drain regions (not shown) formed in theactive region of the peripheral circuit board SUB at both sides of thegate PG. A gate insulating film 204 may be between the peripheralcircuit board SUB and the gate PG, and both sidewalls of the gate PG maybe covered with insulating spacers 210. A plurality of contact plugs 220may be connected to the plurality of transistors TR. The peripheralcircuit region P30 may further include unit devices such as a resistorand a capacitor.

The peripheral circuit interconnection unit P80 may be between theperipheral circuit region P30 and the memory structure M4A. Theperipheral circuit interconnection unit P80 may have a multilayerinterconnection structure including a plurality of lower conductivepatterns M252, M262, and B272 and a plurality of contact plugs C254,C264, and C274. The number of layers of the multilayer interconnectionstructure is not limited to the illustration in FIG. 6, and may have themultilayer interconnection structure having various number of layers asnecessary. At least some of the plurality of lower conductive patternsM252, M262, and B272 and the plurality of contact plugs C254, C264, andC274 may be electrically connected to the plurality of transistors TR inthe peripheral circuit region P30.

The plurality of contact plugs 220, the plurality of lower conductivepatterns M252, M262, and B272, and the plurality of contact plugs C254,C264, and C274 may include metal, conductive metal nitride, metalsilicide, and/or combinations thereof, respectively. In exampleembodiments, the plurality of contact plugs 220, the plurality of lowerconductive patterns M252, M262, and B272, and the plurality of contactplugs C254, C264, and C274 may include W, Al, Cu, Mo, Ti, Co, Ta, Ni,tungsten silicide, titanium silicide, cobalt silicide, tantalumsilicide, nickel silicide, and/or combinations thereof. For example, theplurality of contact plugs 220, the plurality of lower conductivepatterns M252, M262, and B272, and the plurality of contact plugs C254,C264, and C274 may respectively include a metal pattern including W, Al,or Cu and a conductive barrier film surrounding the metal pattern. Theconductive barrier film may include Ti, TiN, Ta, TaN, and/orcombinations thereof.

Conductive regions included in the peripheral circuit region P30 and theperipheral circuit interconnection unit P80 may be covered with aninterlayer insulating film 290. The interlayer insulating film 290 mayinclude silicon oxide, silicon nitride, SiON, and/or SiOCN.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P80 may be bonded to each other. In the firstregion A1, a plurality of conductive bonding structures BS may bedisposed along a boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P80, which arebonded to each other. Each of the plurality of conductive bondingstructures BS may include a bonding result of the upper conductivepattern B162 included in the memory cell interconnection unit C60 andthe lower conductive pattern B272 included in the peripheral circuitinterconnection unit P80. The upper conductive pattern B162 and thelower conductive pattern B272 constituting each of the plurality ofconductive bonding structures BS may have a structure in which they areintegrally coupled to each other without the boundary between them.

A back surface 102B of the semiconductor layer 102 and a back surfaceC70B of the memory cell insulation unit C70 may be covered with aninsulating film 430. The insulating film 430 may include a silicon oxidefilm, a silicon nitride film, and/or a polymer film. A conductive pad440 may be formed on the insulating film 430. The conductive pad 440 maybe spaced apart from the memory structure M4A with the insulating film430 therebetween. The conductive pad 440 may extend in the horizontaldirection along the X-Y plane outside the memory structure M4A. Theconductive pad 440 may not include a portion overlapping the memorystack MS in the vertical direction (the Z direction).

In example embodiments, the conductive pad 440 may include a stackedstructure of a first conductive film and a second conductive film. Thefirst conductive film may include Ti, Cu, Ni, Au, NiV, NiP, TiNi, TiW,TaN, Al, Pd, CrCu, and/or combinations thereof. For example, the firstconductive film may include a Cr/Cu/Au stacked structure, a Cr/CrCu/Custacked structure, a TiWCu compound, a TiWCu/Cu stacked structure, aNi/Cu stacked structure, a NiV/Cu stacked structure, a Ti/Ni stackedstructure, a Ti/NiP stacked structure, a TiWNiV compound, an Al/Ni/Austacked structure, an Al/NiP/Au stacked structure, a stacked structureof Ti/TiNi/CuNi compound, a Ti/Ni/Pd stacked structure, a Ni/Pd/Austacked structure, or a NiP/Pd/Au stacked structure. The secondconductive film may include Ni, Cu, Al, and/or combinations thereof.

A through electrode THV4 may be disposed in the second region A2, inwhich the through electrode THV4 may penetrate the insulating film 430and the memory cell insulation unit C70, and may extend to theperipheral circuit interconnection unit P80 in the vertical direction(the Z direction). The through electrode THV4 may extend to a lowerconductive pattern M262 through a portion of the interlayer insulatingfilm 290 included in the peripheral circuit interconnection unit P80.One end of the through electrode THV4 may be in contact with the lowerconductive pattern M262, and the other end of the through electrode THV4may be in contact with the conductive pad 440. The through electrodeTHV4 may include at least one metal selected from among W, Au, Ag, Cu,Al, TiAlN, WN, Ir, Pt, Pd, Ru, Zr, Rh, Ni, Co, Cr, Sn, and/or Zn. Inexample embodiments, the through electrode THV4 may include a metal filmincluding W and a conductive barrier film surrounding the metal film.The conductive barrier film may include Ti, TiN, Ta, TaN, and/orcombinations thereof.

Although one through electrode THV4 is illustrated in FIG. 6, theintegrated circuit device 400A may include a plurality of throughelectrodes THV4 in the second region A2, in which the through electrodeTHV4 may penetrate the insulating layer 430 and the memory cellinsulation unit C70 and may extend to the peripheral circuitinterconnection unit P80 in the vertical direction (the Z direction). Asdescribed with respect to the plurality of through electrodes THV withreference to FIG. 5A or 5B, the plurality of through electrodes THV4 mayinclude the plurality of through electrodes THV1 arranged in a line inthe extension direction (the Y direction) of the plurality of bit linesBL included in the memory stack unit MSP and the plurality of throughelectrodes THV2 arranged in a line in the width direction (the Xdirection) of the plurality of bit lines BL.

In the peripheral circuit interconnection unit P80, the lower conductivepattern M262 contacting one end of the through electrode THV4 may beformed at a different level than the lower conductive pattern B272constituting the plurality of conductive bonding structures BS. Herein,the term “level” means a distance in the vertical direction (Z directionor −Z direction) from the main surface SM of the peripheral circuitboard SUB. The shortest distance from the main surface SM of theperipheral circuit board SUB to the lower conductive pattern B272 whichconstitutes the conductive bonding structure BS, may be greater than theshortest distance from the main surface SM to the lower conductivepattern M262, which is in contact with one end of the through electrodeTHV4. The lower conductive pattern B272 constituting the conductivebonding structure BS may be disposed along the boundary 410 between thememory cell interconnection unit C60 and the peripheral circuitinterconnection unit P80, and the lower conductive pattern M262 incontact with one end of the through electrode THV4 may be spaced apartfrom the boundary 410 between the memory cell interconnection unit C60and the peripheral circuit interconnection unit P80 in a directionapproaching the peripheral circuit board SUB.

The lower conductive pattern M262 contacting one end of the throughelectrode THV4 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may include differentmetals. In example embodiments, the lower conductive pattern M262contacting one end of the through electrode THV4 may include A1, and thelower conductive pattern B272 constituting the conductive bondingstructure BS may include Cu.

The lower conductive pattern M262 contacting one end of the throughelectrode THV4 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may have differentcross-sectional shapes in the vertical direction (the Z direction). Inexample embodiments, the lower conductive pattern M262 contacting oneend of the through electrode THV4 may have a cross-sectional shape inwhich a width in the horizontal direction along the X-Y plane decreasesas the lower conductive pattern M262 becomes closer toward theconductive structure M4A, and the lower conductive pattern B272constituting the bonding structure BS may have the cross-sectional shapein which the width in the horizontal direction along the X-Y planeincreases as the lower conductive pattern B272 becomes closer toward thememory structure M4A.

The conductive bonding structure BS may not exist in an electricalconnection path between the through electrode THV4 and the peripheralcircuits in the peripheral circuit region P30. Thus, the increase inresistance due to the conductive bonding structure BS in the electricalconnection path between the through electrode THV4 and the peripheralcircuits in the peripheral circuit region P30 may be reduced orprevented. In particular, when the through electrode THV4 is connectedto a circuit used for inputting/outputting data, addresses, or commands,such as the data input/output circuit 36 described with reference toFIG. 1, an ESD circuit, a pull-up/pull-down driver, or a circuitsensitive to resistance, the reliability of the integrated circuitdevice 400A may be improved by reducing the resistance in the electricalconnection path via the through electrode THV4.

FIG. 7 is a cross-sectional view illustrating an integrated circuitdevice 400B according to example embodiments of the inventive concepts.

Referring to FIG. 7, the integrated circuit device 400B may havesubstantially the same configuration as the integrated circuit device400A described with reference to FIG. 6. However, the integrated circuitdevice 400B may include a conductive pad 450 formed on the insulatingfilm 430. The conductive pad 450 may have substantially the sameconfiguration as the conductive pad 440 described with reference to FIG.6. However, the conductive pad 450 may include a portion overlapping thememory stack MS in the vertical direction (the Z direction). Therefore,an area in which the conductive pads 450 may extend outwardly beyond thememory structure M4A in the horizontal direction may be reduced, therebyreducing the increase of a planar size of a chip due to the conductivepads 450. Therefore, it may contribute to reducing the planar size ofthe chip including the integrated circuit device 400B.

FIG. 8 is a cross-sectional view illustrating an integrated circuitdevice 400C according to example embodiments of the inventive concepts.

Referring to FIG. 8, the integrated circuit device 400C may havesubstantially the same configuration as the integrated circuit device400A described with reference to FIG. 6. However, the peripheral circuitstructure P4C of the integrated circuit device 400C may include aperipheral circuit interconnection unit P84. The peripheral circuitinterconnection unit P84 may have a multilayer interconnection structureincluding a plurality of lower conductive patterns M252, M462, and B272and a plurality of contact plugs C254, C264, and C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P80 may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P80, which arebonded to each other.

In the second region A2, the through electrode THV4 may extend to theperipheral circuit interconnection unit P84 in the vertical direction(the Z direction), through the insulating layer 430 and the memory cellinsulation unit C70. The through electrode THV4 may extend to the lowerconductive pattern M462 included in the peripheral circuitinterconnection unit P84. One end of the through electrode THV4 may bein contact with the lower conductive pattern M462.

The lower conductive pattern M462 contacting one end of the throughelectrode THV4 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may be formed at differentlevels. The shortest distance from the main surface SM of the peripheralcircuit board SUB to the lower conductive pattern B272 which constitutesthe conductive bonding structure BS, may be greater than the shortestdistance from the main surface SM to the lower conductive pattern M462which is in contact with one end of the through electrode THV4.

The lower conductive pattern M462 contacting one end of the throughelectrode THV4 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may include the samemetal. In example embodiments, the lower conductive pattern M462contacting one end of the through electrode THV4 and the lowerconductive pattern B272 constituting the conductive bonding structure BSmay include Cu, respectively.

The lower conductive pattern M462 contacting one end of the throughelectrode THV4 and the lower conductive pattern B272 constituting theconductive bonding structure BS may have the cross-sectional shape inwhich the width in the horizontal direction along the X-Y planeincreases as they become closer toward the memory structure M4A,respectively.

FIG. 9 is a cross-sectional view illustrating an integrated circuitdevice 400D according to example embodiments of the inventive concepts.

Referring to FIG. 9, the integrated circuit device 400D may havesubstantially the same configuration as the integrated circuit device400C described with reference to FIG. 8. However, the integrated circuitdevice 400D may include the conductive pad 450 formed on the insulatingfilm 430. The conductive pad 450 may include a portion overlapping thememory stack MS in the vertical direction (the Z direction).

FIG. 10 is a cross-sectional view illustrating an integrated circuitdevice 500A according to example embodiments of the inventive concepts.

Referring to FIG. 10, the integrated circuit device 500A may havesubstantially the same configuration as the integrated circuit device400A described with reference to FIG. 6. However, the peripheral circuitstructure P5A of the integrated circuit device 500A may include aperipheral circuit interconnection unit P85A. The peripheral circuitinterconnection unit P85A may have a multilayer interconnectionstructure including a plurality of lower conductive patterns M252, M262,B272 and B574 and a plurality of contact plugs C254, C264, and C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P85A may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P85A, which arebonded to each other.

In the second region A2, a through electrode THVS may extend to theperipheral circuit interconnection unit P85A in the vertical direction(the Z direction), through the insulating layer 430 and the memory cellinsulation unit C70. The through electrode THVS may extend to the lowerconductive pattern B574 included in the peripheral circuitinterconnection unit P85A. One end of the through electrode THV5 may bein contact with the lower conductive pattern B574, and the other end ofthe through electrode THV5 may be in contact with the conductive pad440. More detailed configuration with respect to the through electrodeTHV5 may be substantially the same as that described with respect to thethrough electrode THV4 with reference to FIG. 6.

The lower conductive pattern B574 and the lower conductive pattern B272may be formed at the same level. The shortest distance from the mainsurface SM of the peripheral circuit board SUB to the lower conductivepattern B272 may be approximately the same as or similar to the shortestdistance from the main surface SM to the lower conductive pattern B574.The lower conductive pattern B574 and the lower conductive pattern B272may include the same metal. In example embodiments, the lower conductivepattern B574 and the lower conductive pattern B272 may respectivelyinclude Cu. The lower conductive pattern B574 and the lower conductivepattern B272 may have the cross-sectional shape in which the width inthe horizontal direction along the X-Y plane increases as they becomecloser toward the memory structure M4A, respectively.

The conductive bonding structure BS may not exist in an electricalconnection path between the through electrode THV5 and peripheralcircuits in the peripheral circuit region P30. Thus, the increase inresistance due to the conductive bonding structure BS in the electricalconnection path between the through electrode THV5 and the peripheralcircuits in the peripheral circuit region P30 may be reduced orprevented.

FIG. 11 is a cross-sectional view illustrating an integrated circuitdevice 500B according to example embodiments of the inventive concepts.

Referring to FIG. 11, the integrated circuit device 500B may havesubstantially the same configuration as the integrated circuit device500A described with reference to FIG. 10. However, the integratedcircuit device 500B may include the conductive pad 450 formed on theinsulating film 430. The conductive pad 450 may include a portionoverlapping the memory stack MS in the vertical direction (the Zdirection).

FIG. 12 is a cross-sectional view illustrating an integrated circuitdevice 500C according to example embodiments of the inventive concepts.

Referring to FIG. 12, the integrated circuit device 500C may havesubstantially the same configuration as the integrated circuit device400A described with reference to FIG. 6. However, the peripheral circuitstructure PSC of the integrated circuit device 500C may include aperipheral circuit interconnection unit P85C. The peripheral circuitinterconnection unit P85C may have a multilayer interconnectionstructure including a plurality of lower conductive patterns M252, M262,B272 and M574 and a plurality of contact plugs C254, C264, and C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P85C may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P85C, which arebonded to each other.

In the second region A2, the through electrode THV5 may extend to theperipheral circuit interconnection unit P85C in the vertical direction(the Z direction), through the insulating layer 430 and the memory cellinsulation unit C70. The through electrode THV5 may extend to the lowerconductive pattern M574 included in the peripheral circuitinterconnection unit P85C. One end of the through electrode THV5 may bein contact with the lower conductive pattern M574.

The lower conductive pattern M574 and the lower conductive pattern B272constituting the plurality of conductive bonding structures BS may beformed at the same level. The shortest distance from the main surface SMof the peripheral circuit board SUB to the lower conductive pattern B272may be approximately the same as or similar to the shortest distancefrom the main surface SM to the lower conductive pattern M574.

The lower conductive pattern M574 and the lower conductive pattern B272may include the same metal. In example embodiments, the lower conductivepattern M574 and the lower conductive pattern B272 may include Cu,respectively. The lower conductive pattern M574 and the lower conductivepattern B272 may have different cross-sectional shapes in the verticaldirection (the Z direction). In example embodiments, the lowerconductive pattern M574 may have the cross-sectional shape in which thewidth in the horizontal direction along the X-Y plane decreases as itbecomes closer to the memory structure M4A, and the lower conductivepattern B272 may have the cross-sectional shape in which the width inthe horizontal direction along the X-Y plane increases as it becomescloser to the memory structure M4A.

FIG. 13 is a cross-sectional view illustrating an integrated circuitdevice 500D according to example embodiments of the inventive concepts.

Referring to FIG. 13, the integrated circuit device 500D may havesubstantially the same configuration as the integrated circuit device500C described with reference to FIG. 12. However, the integratedcircuit device 500D may include the conductive pad 450 formed on theinsulating film 430. The conductive pad 450 may include a portionoverlapping the memory stack MS in the vertical direction (the Zdirection).

The integrated circuit devices 400A, 400B, 400C, 400D, 500A, 500B, 500C,and 500D illustrated in FIGS. 6 to 13 may be a portion of the integratedcircuit device 300A illustrated in FIG. 5A or the integrated circuitdevice 300B illustrated in FIG. 5B, respectively.

FIG. 14A is an exploded plan view illustrating some components of anintegrated circuit device 600A according to example embodiments of theinventive concepts. The integrated circuit device 600A may havesubstantially the same configuration as the integrated circuit device200 illustrated in FIG. 3. The integrated circuit device 600A mayinclude a plurality of through electrodes TSV penetrating only theperipheral circuit structure PST without penetrating the memorystructure MST. The plurality of through electrodes TSV may extend in thevertical direction (the Z direction) to completely penetrate theperipheral circuit board SUB and the peripheral circuit region P30 ofthe peripheral circuit structure PST and partially penetrate theperipheral circuit interconnection unit P80. However, the plurality ofthrough electrodes TSV may be disposed to surround four sides of theperipheral circuit structure PST. A plurality of through electrodesTSV1, which is a portion of the plurality of through electrodes TSV, maybe arranged in a line in the extension direction (the Y direction) ofthe plurality of bit lines BL included in the memory stack unit MSP. Aplurality of through electrodes TSV2, which is another portion of theplurality of through electrodes TSV, may be arranged in a line in thewidth direction (the X direction) of the plurality of bit lines BLincluded in the memory stack unit MSP. More detailed configurations ofthe plurality of through electrodes TSV may be substantially the same asthose described with reference to FIG. 3.

FIG. 14B is an exploded plan view illustrating some components of anintegrated circuit device 600B according to example embodiments of theinventive concepts. The integrated circuit device 600B may havesubstantially the same configuration as the integrated circuit device600A illustrated in FIG. 14A. However, in the integrated circuit device600B, the plurality of through electrodes TSV may be disposed tosurround three sides of the peripheral circuit structure PST.

FIGS. 14A and 14B illustrate a configuration in which a plurality ofthrough electrodes TSV are disposed to surround at least three sides ofthe peripheral circuit structure PST, but the inventive concepts are notlimited to example embodiments illustrated in FIGS. 14A and 14B. Forexample, the plurality of through electrodes TSV may be arranged tosurround one side or two sides of the peripheral circuit structure PST.

FIG. 15 is a cross-sectional view illustrating an integrated circuitdevice 700A according to example embodiments of the inventive concepts.

Referring to FIG. 15, the integrated circuit device 700A may havesubstantially the same configuration as the integrated circuit device400A described with reference to FIG. 6. However, the integrated circuitdevice 700A may include an insulating film 730 covering a back surfaceSB of the peripheral circuit board SUB. A conductive pad 740 may beformed on the insulating film 730. The conductive pad 740 may be spacedapart from the peripheral circuit board SUB with the insulating layer730 therebetween.

In the integrated circuit device 700A, the peripheral circuitinterconnection unit P87A of the peripheral circuit structure P7A mayinclude a multilayer interconnection structure including the pluralityof lower conductive patterns M252, M262, and B272 and the plurality ofcontact plugs C254, C264, C274. A through electrode TSV7 may be arrangedin the second region A2, in which the through electrode TSV7 extends tothe peripheral circuit interconnection unit P87A through the insulatingfilm 730, the peripheral circuit board SUB, and the peripheral circuitarea P30 in the vertical direction (the Z direction). The throughelectrode THV7 may extend to the lower conductive pattern M262 includedin the peripheral circuit interconnection unit P87A. One end of thethrough electrode THV7 may be in contact with the lower conductivepattern M262, and the other end of the through electrode THV7 may be incontact with the conductive pad 740.

More detailed configurations with respect to the insulating film 730,the conductive pad 740, and the through electrode TSV7 may be generallythe same as those described with respect to the insulating film 430, theconductive pad 440, and the through electrode THV4 with reference toFIG. 6.

Although one through electrode TSV7 is illustrated in the second regionA2 in FIG. 15, the integrated circuit device 700A may include aplurality of through electrodes TSV7 in the second region A2, whichextend to the peripheral circuit interconnection unit P87A through theinsulating film 730, the peripheral circuit board SUB, and theperipheral circuit region P30 in the vertical direction (the Zdirection). As described with respect to the plurality of throughelectrodes THV with reference to FIGS. 14A or 14B, the plurality ofthrough electrodes THV7 may include the plurality of through electrodesTHV1 arranged in a line in the extension direction (the Y direction) ofthe plurality of bit lines BL and the plurality of through electrodesTHV2 arranged in a line in the width direction (the X direction) of theplurality of bit lines BL.

The lower conductive pattern M262 contacting one end of the throughelectrode TSV7 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may be formed at differentlevels, and may include different metals. In addition, the lowerconductive pattern M262 may have the cross-sectional shape in which thewidth in the horizontal direction along the X-Y plane decreases as thelower conductive pattern M262 becomes closer toward the memory structureM4A, and the lower conductive pattern B272 may have the cross-sectionalshape in which the width in the horizontal direction along the X-Y planeincreases as the lower conductive pattern B272 becomes closer toward thememory structure M4A.

The conductive bonding structure BS may not exist in an electricalconnection path between the through electrode THV7 and the peripheralcircuits in the peripheral circuit region P30. Thus, the increase inresistance due to the conductive bonding structure BS in the electricalconnection path between the through electrode THV7 and the peripheralcircuits in the peripheral circuit region P30 may be reduced orprevented.

In addition, since the through electrode TSV7 may be configured topenetrate only the peripheral circuit structure P7A without penetratingthe memory structure M4A, even if the stacked number of word lines WLare increased in order to improve the degree of integration in thememory stack MS and the number of contacts connected to the word linesWL and the number of interconnections are increased, a vertical lengthof the through electrode TSV7 may be kept constant regardless of theincrease in height in the vertical direction of the memory stack MS.Accordingly, even if the stacked number of word lines WL are increasedto increase the vertical height of the memory stack MS, a resistancevalue may be kept constant in an electrical connection path connected tothe outside from a circuit used to input/output data, an address, or acommand, or a circuit sensitive to resistance.

FIG. 16 is a cross-sectional view illustrating an integrated circuitdevice 700B according to example embodiments of the inventive concepts.

Referring to FIG. 16, the integrated circuit device 700B may havesubstantially the same configuration as the integrated circuit device700A described with reference to FIG. 15. In the integrated circuitdevice 700B, the peripheral circuit interconnection unit P87B of theperipheral circuit structure P7B may include a multilayerinterconnection structure including the plurality of lower conductivepatterns M252, M762, and B272 and the plurality of contact plugs C254,C264, C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P87B may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P87B, which arebonded to each other. One end of the through electrode TSV7 may contactthe lower conductive pattern M762 in the second region A2.

The lower conductive pattern M762 contacting one end of the throughelectrode THV7 and the lower conductive pattern B272 constituting theplurality of conductive bonding structures BS may be formed at differentlevels. The lower conductive pattern M762 and the lower conductivepattern B272 may include the same metal. The lower conductive patternM762 and the lower conductive pattern B272 may have the cross-sectionalshape in which the width in the horizontal direction along the X-Y planeincreases as they become closer to the memory structure M4A,respectively.

FIG. 17 is a cross-sectional view illustrating an integrated circuitdevice 800A according to example embodiments of the inventive concepts.

Referring to FIG. 17, the integrated circuit device 800A may havesubstantially the same configuration as the integrated circuit device700A described with reference to FIG. 15. However, the peripheralcircuit interconnection unit P88A of the peripheral circuit structureP8A in the integrated circuit device 800A may include a multilayerinterconnection structure including a plurality of lower conductivepatterns M252, M262, M264, B272, and B874 and a plurality of contactplugs C254, C264, and C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P88A may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P88A, which arebonded to each other.

In the second region A2, a through electrode TSV8 may extend in thevertical direction (the Z direction) to the peripheral circuitinterconnection unit P88A through the insulating film 730, theperipheral circuit board SUB, and the peripheral circuit region P30. Oneend of the through electrode THV8 may be in contact with the lowerconductive pattern B874. More detailed configuration with respect to thethrough electrode THV8 may be substantially the same as that describedwith respect to the through electrode THV4 with reference to FIG. 6.

The lower conductive pattern B874 and the lower conductive pattern B272may be formed at the same level. The lower conductive pattern B874 andthe lower conductive pattern B272 may include the same metal. The lowerconductive pattern B874 and the lower conductive pattern B272 may havethe cross-sectional shape in which the width in the horizontal directionalong the X-Y plane increases as they become closer to the memorystructure M4A, respectively.

The conductive bonding structure BS may not exist in an electricalconnection path between the through electrode THV8 and the peripheralcircuits in the peripheral circuit region P30. Thus, an increase inresistance due to the conductive bonding structure BS in the electricalconnection path between the through electrode THV8 and the peripheralcircuits in the peripheral circuit region P30 may be reduced orprevented.

In addition, since the through electrode TSV8 may be configured topenetrate only the peripheral circuit structure P8A without penetratingthe memory structure M4A, even if the stacked number of word lines WLare increased in order to improve the degree of integration in thememory stack MS and the number of contacts connected to the word linesWL and the number of interconnections are increased, a vertical lengthof the through electrode TSV8 may be kept constant regardless of theincrease in height in the vertical direction of the memory stack MS.Accordingly, even if the stacked number of word lines WL are increasedto increase the vertical height of the memory stack MS, a resistancevalue may be kept constant in an electrical connection path connected tothe outside from a circuit used to input/output data, an address, or acommand, or a circuit sensitive to resistance.

FIG. 18 is a cross-sectional view illustrating an integrated circuitdevice 800B according to example embodiments of the inventive concepts.

Referring to FIG. 18, the integrated circuit device 800B may havesubstantially the same configuration as the integrated circuit device800A described with reference to FIG. 17. However, the peripheralcircuit interconnection unit P88B of the peripheral circuit structureP8B in the integrated circuit device 800B may include a multilayerinterconnection structure including a plurality of lower conductivepatterns M252, M262, B272, and M574 and a plurality of contact plugsC254, C264, and C274.

The memory cell interconnection unit C60 and the peripheral circuitinterconnection unit P88B may be bonded to each other. In the firstregion A1, the plurality of conductive bonding structures BS may bedisposed along the boundary 410 between the memory cell interconnectionunit C60 and the peripheral circuit interconnection unit P88B, which arebonded to each other.

One end of the through electrode TSV8 may contact the lower conductivepattern M574 in the second region A2. A detailed description of thelower conductive pattern M574 may be as described with reference to FIG.12.

The integrated circuit devices 700A, 700B, 800A, and 800B described withreference to FIGS. 15 to 18 may respectively constitute a portion of theintegrated circuit device 600A illustrated in FIG. 14A or the integratedcircuit device 600B illustrated in FIG. 14B.

FIGS. 19A to 19D are cross-sectional views illustrating a manufacturingmethod of an integrated circuit device according to example embodimentsof the inventive concepts. A method of manufacturing the integratedcircuit device 400A illustrated in FIG. 6 will be described withreference to FIGS. 19A to 19D.

Referring to FIG. 19A, the memory structure M4A including the memorystack unit MSP, the memory cell interconnection unit C60, and a memorycell insulation unit C70 may be formed on a substrate 910.

The substrate 910 may include silicon. In example embodiments, thesemiconductor layer 102 may include polysilicon formed by a depositionprocess on the substrate 910. In other example embodiments, thesemiconductor layer 102 may include a silicon film integrally formedwith the substrate 910.

Referring to FIG. 19B, after forming the peripheral circuit structureP4A in which the peripheral circuit region P30 and the peripheralcircuit interconnection unit P80 are stacked on the peripheral circuitboard SUB, the peripheral circuit board SUB and the substrate 910 may bealigned such that the circuit interconnection unit P80 face the memorycell interconnection unit C60 and the memory cell insulation unit C70 ofthe memory structure M4A to each other.

Referring to FIG. 19C, the plurality of conductive bonding structures BSmay be formed by performing the bonding process between the memory cellinterconnection unit C60 and the memory cell insulation unit C70, andthe peripheral circuit interconnection unit P80.

In some example embodiments, the memory cell interconnection unit C60and the memory cell insulation unit C70, and the peripheral circuitinterconnection unit P80 may be brought into contact with each other ina state of facing each other, and then subjected to heat treatment underpressure. The heat treatment may be performed at a temperature of about180° C. to about 300° C. The conductive bonding structure BS may beformed by being integrally coupled without a boundary between the upperconductive pattern B162 and the lower conductive pattern B272 which arein contact with each other, while metals constituting each of the upperconductive pattern B162 and the lower conductive pattern B272 that arein contact with each other reflow by heat treatment during the bondingprocess.

Referring to FIG. 19D, the substrate 910 may be removed from theresultant of FIG. 19C by grinding to expose the semiconductor layer 102and the memory cell insulation unit C70, and then the insulating film430 may be formed to cover a back surface 102B of the semiconductorlayer 102 and a back surface C70B of the memory cell insulation unitC70. Thereafter, in the second region A2, the through hole TVH may beformed to penetrate the insulating layer 430, the memory cell insulationunit C70, and a portion of the interlayer insulating film 290 and toexpose the lower conductive pattern M262.

Thereafter, the through electrode THV4 filling the through hole TVH maybe formed, and then the conductive pad 440 may be formed on theinsulating film 430 to manufacture the integrated circuit device 400Aillustrated in FIG. 6.

FIGS. 20A to 20C are cross-sectional views illustrating a method ofmanufacturing an integrated circuit device in the order of process,according to other example embodiments of the inventive concepts. Themethod of manufacturing the integrated circuit device 700A illustratedin FIG. 15 will be described with reference to FIGS. 20A to 20C.

Referring to FIG. 20A, after forming the memory structure M4A on thesubstrate 910 by the same method as that described with reference toFIG. 19A, the peripheral circuit structure P7A stacked with theperipheral circuit region P30 and the peripheral circuit interconnectionunit P87A may be formed on the peripheral circuit board SUB in a similarmanner as that described with reference to FIG. 19B, and then theperipheral circuit board SUB and the substrate 910 may be aligned suchthat the peripheral circuit interconnection unit P87A of the peripheralcircuit structure P7A face the interconnection unit C60 and the memorycell insulation unit C70 to each other.

Referring to FIG. 20B, the bonding process between the memory cellinterconnection unit C60 and the memory cell insulation unit C70, andthe peripheral circuit interconnection unit P87A may be performed by amethod similar to that described with reference to FIG. 19C.

Referring to FIG. 20C, thereafter, the substrate 910 may be removed fromthe resultant of FIG. 20B by grinding, the insulating film 730 may beformed to cover the back surface SB of the peripheral circuit board SUB,and the through hole TSH may be formed to penetrate the insulating film730, the peripheral circuit board SUB, and the peripheral circuit regionP30 and to expose the lower conductive pattern M262 included in theperipheral circuit interconnection unit P87A in the second region A2.

Thereafter, the through electrode TSV7 filling the through hole TSH maybe formed, and then the conductive pad 740 may be formed on theinsulating film 730 to manufacture the integrated circuit device 700Aillustrated in FIG. 15.

Even though methods of manufacturing the integrated circuit device 400Aillustrated in FIG. 6 and the integrated circuit device 700A illustratedin FIG. 15 has been described with reference to FIGS. 19A to 19D and 20Ato 20C, those skilled in the art will appreciate that the integratedcircuit devices illustrated in FIGS. 2, 3, 5A, 5B, 7 to 13, 14A, 14B,and 16 to 18, and various integrated circuit devices having a structuresimilar thereto may be manufactured by applying various modificationsand changes within the scope of inventive concept, from those describedwith reference to FIGS. 19A to 19D and 20A to 20C.

While the inventive concept has been particularly shown and describedwith reference to embodiments thereof, it will be understood thatvarious changes in form and details may be made therein withoutdeparting from the spirit and scope of the following claims.

What is claimed is:
 1. An integrated circuit device comprising: a memorycomprising a memory stack, a memory cell interconnection comprising aplurality of upper conductive patterns configured to be electricallyconnectable to the memory stack, and a memory cell insulationsurrounding the memory stack and the memory cell interconnection; aperipheral circuit comprising a peripheral circuit board, a peripheralcircuit region on the peripheral circuit board, and a peripheral circuitinterconnection comprising a plurality of lower conductive patternsbetween the peripheral circuit region and the memory; a plurality ofconductive bonding structures comprising a plurality of first upperconductive patterns selected from among the plurality of upperconductive patterns and a plurality of first lower conductive patternsselected from among the plurality of lower conductive patterns in afirst region, at least a portion of the first region overlapping thememory stack in a vertical direction, the plurality of first upperconductive patterns being bonded to the respective plurality of firstlower conductive patterns; and a through electrode penetrating one ofthe memory cell insulation and the peripheral circuit board and extendedto a second lower conductive pattern selected from among the pluralityof lower conductive patterns in the vertical direction, in a secondregion, at least a portion of the second region overlapping the memorycell insulation in the vertical direction.
 2. The integrated circuitdevice of claim 1, wherein the through electrode penetrates the memorycell insulation and extends to the second lower conductive pattern. 3.The integrated circuit device of claim 1, wherein the through electrodepenetrates the peripheral circuit board and the peripheral circuitregion and extends to the second lower conductive pattern.
 4. Theintegrated circuit device of claim 1, wherein the plurality of firstlower conductive patterns and the second lower conductive pattern are atdifferent levels.
 5. The integrated circuit device of claim 1, whereinthe plurality of first lower conductive patterns and the second lowerconductive pattern are at the same level.
 6. The integrated circuitdevice of claim 1, wherein the plurality of first lower conductivepatterns and the second lower conductive pattern comprise differentmetals.
 7. The integrated circuit device of claim 1, wherein theplurality of first lower conductive patterns and the second lowerconductive pattern comprise the same metal.
 8. The integrated circuitdevice of claim 1, wherein each of the plurality of first lowerconductive patterns and the second lower conductive pattern has a shapein which a width in a horizontal direction increases as the plurality offirst lower conductive patterns and the second lower conductive patternrespectively becomes closer toward the memory.
 9. The integrated circuitdevice of claim 1, wherein each of the plurality of first lowerconductive patterns has a shape in which a width in a horizontaldirection increases as each of the plurality of first lower conductivepatterns becomes closer toward the memory, and the second lowerconductive pattern has a shape in which a width in the horizontaldirection decreases as the second lower conductive pattern becomescloser toward the memory.
 10. The integrated circuit device of claim 1,further comprising a conductive pad in contact with the throughelectrode and extending in a horizontal direction outside of the memory,wherein the conductive pad comprises a portion overlapping the memorystack in the vertical direction.
 11. The integrated circuit device ofclaim 1, further comprising a conductive pad in contact with the throughelectrode and extending in a horizontal direction outside of theperipheral circuit, wherein the conductive pad is spaced apart from theperipheral circuit region with the peripheral circuit boardtherebetween.
 12. An integrated circuit device comprising: a memorycomprising a memory stack comprising a plurality of bit lines extendingin a first horizontal direction, a memory cell interconnectioncomprising a plurality of upper conductive patterns configured to beelectrically connectable to the plurality of bit lines, and a memorycell insulation surrounding the memory stack and the memory cellinterconnection; a peripheral circuit comprising a peripheral circuitboard, a peripheral circuit region on the peripheral circuit board, anda peripheral circuit interconnection comprising a plurality of lowerconductive patterns between the peripheral circuit region and thememory; a conductive bonding structure comprising a first upperconductive pattern selected from among the plurality of upper conductivepatterns and a first lower conductive pattern selected from among theplurality of lower conductive patterns in a first region, at least aportion of the first region overlapping the memory stack in a verticaldirection, the first upper conductive pattern being bonded to the firstlower conductive pattern; and a plurality of through electrodes extendedin the vertical direction through the peripheral circuit board, in asecond region spaced apart from the first region in a horizontaldirection, wherein the plurality of through electrodes comprise aplurality of first through electrodes arranged in a line along the firsthorizontal direction in the second region.
 13. The integrated circuitdevice of claim 12, wherein the plurality of through electrodes furthercomprise a plurality of second through electrodes arranged in a linealong a second horizontal direction perpendicular to the firsthorizontal direction in the second region.
 14. The integrated circuitdevice of claim 12, wherein the plurality of through electrodes compriseone through electrode in contact with a second lower conductive patternselected from among the plurality of lower conductive patterns, and theone through electrode extends to the second lower conductive patternthrough the peripheral circuit board and the peripheral circuit region.15. The integrated circuit device of claim 14, wherein a first shortestdistance from the peripheral circuit board to the first lower conductivepattern is greater than a second shortest distance from the peripheralcircuit board to the second lower conductive pattern.
 16. The integratedcircuit device of claim 14, wherein a first shortest distance from theperipheral circuit board to the first lower conductive pattern is thesame as a second shortest distance from the peripheral circuit board tothe second lower conductive pattern.
 17. The integrated circuit deviceof claim 14, wherein the first lower conductive pattern and the secondlower conductive pattern comprise different metals.
 18. The integratedcircuit device of claim 14, wherein the first lower conductive patternand the second lower conductive pattern comprise the same metal.
 19. Anintegrated circuit device comprising: a memory comprising asemiconductor layer, a memory stack on the semiconductor layer, a memorycell interconnection comprising a plurality of upper conductive patternsconfigured to be electrically connectable to the memory stack, and amemory cell insulation surrounding the memory stack and the memory cellinterconnection; a peripheral circuit comprising a peripheral circuitboard, a peripheral circuit region on the peripheral circuit board, anda peripheral circuit interconnection comprising a plurality of lowerconductive patterns configured to be electrically connectable to theperipheral circuit region, the peripheral circuit interconnectionbetween the peripheral circuit region and the memory; a plurality ofconductive bonding structures comprising Cu and comprising a pluralityof first upper conductive patterns selected from among the plurality ofupper conductive patterns and a plurality of first lower conductivepatterns selected from among the plurality of lower conductive patternsin a first region, at least a portion of the first region overlappingthe memory stack in a vertical direction, the plurality of first upperconductive patterns being bonded to the respective plurality of firstlower conductive patterns; and a through electrode penetrating one ofthe memory cell insulation and the peripheral circuit board in a secondregion and contacting one lower conductive pattern among the pluralityof lower conductive patterns.
 20. The integrated circuit device of claim19, wherein the plurality of lower conductive patterns comprise a secondlower conductive pattern in contact with the through electrode, each ofthe plurality of first lower conductive patterns has a shape in which awidth in a horizontal direction increases as each of the plurality offirst lower conductive patterns respectively becomes closer toward thememory, and the second lower conductive pattern has a shape in which awidth in the horizontal direction decreases as the second lowerconductive pattern becomes closer toward the memory.